Growth of ZrO2 films on mesoporous silica sieve via atomic layer deposition
| Autor: | Rasteiro, Letícia F., Motin, Md Abdul, Vieira, Luiz H., Assaf, Elisabete M., Zaera, Francisco |
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| Zdroj: | In Thin Solid Films 1 March 2023 768 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect