Structure and chemical composition of thin-film nanocomposites based on silver in organosilicon amorphous matrix prepared by High Target Utilization Sputtering

Autor: Izai, Vitalii, Fiantok, Tomáš, Vidiš, Marek, Truchlý, Martin, Satrapinskyy, Leonid, Nagy, Štefan, Roch, Tomáš, Turiničová, Veronika, Kúš, Peter, Mikula, Marian
Zdroj: In Thin Solid Films 31 January 2023 765
Databáze: ScienceDirect