Vacancy-type defects in TiN/ZrO2/TiN capacitors probed by monoenergetic positron beams
| Autor: | Uedono, Akira, Takahashi, Naomichi, Hasunuma, Ryu, Harashima, Yosuke, Shigeta, Yasuteru, Ni, Zeyuan, Matsui, Hidefumi, Notake, Akira, Kubo, Atsushi, Moriya, Tsuyoshi, Michishio, Koji, Oshima, Nagayasu, Ishibashi, Shoji |
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| Zdroj: | In Thin Solid Films 30 November 2022 762 |
| Databáze: | ScienceDirect |
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