Wet scandium etching for hard mask formation on a silicon substrate
| Autor: | Bondareva, Julia, Timofeeva, Ekaterina, Anikanov, Alexandr, Krasilnikov, Maxim, Shibalov, Maxim, Sen, Vasily, Mumlyakov, Alexander, Evlashin, Stanislav, Tarkhov, Mikhail |
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| Zdroj: | In Thin Solid Films 30 November 2022 762 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect