Effect of capping layer on the ferroelectricity of hafnium oxide
| Autor: | Chang, Jui-Hsuan, Zheng, Chen-Gui, Chen, Hsuan-Han, Chen, Pei-Tien, Liu, Cun-Bo, Huang, Kai-Yang, Hsu, Hsiao-Hsuan, Cheng, Chun-Hu, Chou, Wu-Ching, Han, Su-Ting |
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| Zdroj: | In Thin Solid Films 1 July 2022 753 |
| Databáze: | ScienceDirect |
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