Growth of self-assembled nanovoids embedded AlN layer on a low- temperature buffer by metal organic chemical vapor deposition
| Autor: | Kim, Minho, Choi, Uiho, Kim, Keono, Nam, Okhyun |
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| Zdroj: | In Thin Solid Films 30 June 2022 752 |
| Databáze: | ScienceDirect |
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