Effects of silicon doping on the chemical bonding states and properties of nitrogen-doped diamond-like carbon films by plasma-enhanced chemical vapor deposition
| Autor: | Nakamura, K., Ohashi, H., Enta, Y., Kobayashi, Y., Suzuki, Y., Suemitsu, M., Nakazawa, H. |
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| Zdroj: | In Thin Solid Films 31 October 2021 736 |
| Databáze: | ScienceDirect |
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