Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet
| Autor: | Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric M., de Rossi, Sébastien, Baumier, Cédric, Pallier, Florian, Delmotte, Franck |
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| Zdroj: | In Thin Solid Films 1 October 2021 735 |
| Databáze: | ScienceDirect |
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