Beyond surface nanoindentation: Combining static and dynamic nanoindentation to assess intrinsic mechanical properties of chemical vapor deposition amorphous silicon oxide (SiOx) and silicon oxycarbide (SiOxCy) thin films

Autor: Puyo, Maxime, Topka, Konstantina Christina, Diallo, Babacar, Laloo, Raphaël, Genevois, Cécile, Florian, Pierre, Sauvage, Thierry, Samelor, Diane, Senocq, François, Vergnes, Hugues, Caussat, Brigitte, Menu, Marie-Joëlle, Pellerin, Nadia, Vahlas, Constantin, Turq, Viviane
Zdroj: In Thin Solid Films 1 October 2021 735
Databáze: ScienceDirect
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