X-Ray diffraction analysis and modeling of the depth profile of lattice strains in AlGaN stacks
| Autor: | Rafaja, D., Fischer, P., Barchuk, M., Motylenko, M., Röder, C., Besendörfer, S., Meissner, E. |
|---|---|
| Zdroj: | In Thin Solid Films 31 August 2021 732 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect