Development of a Scanning Chemical Vapour Deposition Reactor for the realization of patterned and non-patterned depositions: a preliminary overview
| Autor: | Spanu, Davide, Nemenyi, Anna, Marelli, Marcello, Binda, Gilberto, Guagliardi, Antonietta, Bertolotti, Federica, Giussani, Barbara, Recchia, Sandro |
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| Zdroj: | In Thin Solid Films 1 January 2021 717 |
| Databáze: | ScienceDirect |
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