Design of pulsed neon injection in the synthesis of W-B-C films using magnetron sputtering from a surface-sintered single powder cathode
| Autor: | Wicher, B., Chodun, R., Trzciński, M., Lachowski, A., Kubiś, M., Nowakowska – Langier, K., Zdunek, K. |
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| Zdroj: | In Thin Solid Films 31 December 2020 716 |
| Databáze: | ScienceDirect |
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