Nitrogen doping of MoSx thin films sputtered by reactive High Power Impulse Magnetron Sputtering
| Autor: | Tillmann, Wolfgang, Wittig, Alexandra, Moldenhauer, Henning, Thomann, Carl-Arne, Debus, Joerg, Aurich, Daniel, Bruemmer, Andreas |
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| Zdroj: | In Thin Solid Films 1 November 2020 713 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect