The structure and properties of amorphous diamond-like carbon films deposited by helicon wave plasma chemical vapor deposition
| Autor: | Chen, Jia-li, Ji, Pei-yu, Yang, Yan, Jin, Cheng-gang, Zhuge, Lan-jian, Wu, Xue-mei |
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| Zdroj: | In Thin Solid Films 1 September 2020 709 |
| Databáze: | ScienceDirect |
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