Effect of zincone ratio on mechanical reliability of aluminum-doped zinc oxide-zincone multilayer thin films grown on flexible substrate using atomic/molecular layer deposition hybrid techniques

Autor: Song, Seung Hak, Hwang, Sung-Tae, Choi, Byoung-Ho
Zdroj: In Thin Solid Films 31 July 2020 706
Databáze: ScienceDirect