Effect of the boron-to-nitrogen ratio on leakage current characteristics of boron nitride films prepared by surface-wave plasma enhanced chemical vapor deposition
| Autor: | Kamimura, Y., Matsuura, T., Teii, K., Matsumoto, S. |
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| Zdroj: | In Thin Solid Films 31 July 2020 706 |
| Databáze: | ScienceDirect |
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