Control of the chemical composition of silicon carbon nitride films formed from hexamethyldisilazane in H2/NH3 mixed gas atmospheres by hot-wire chemical vapor deposition
| Autor: | Katamune, Yūki, Mori, Hiroto, Morishita, Fumihiro, Izumi, Akira |
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| Zdroj: | In Thin Solid Films 1 February 2020 695 |
| Databáze: | ScienceDirect |
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