Influence of generation control of the magnetron plasma on structure and properties of copper nitride layers
| Autor: | Nowakowska - Langier, Katarzyna, Skowronski, Lukasz, Chodun, Rafał, Okrasa, Sebastian, Strzelecki, Grzegorz W., Wilczopolska, Magdalena, Wicher, Bartosz, Mirowski, Robert, Zdunek, Krzysztof |
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| Zdroj: | In Thin Solid Films 31 January 2020 694 |
| Databáze: | ScienceDirect |
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