Microstructure and stress gradients in TiW thin films characterized by 40 nm X-ray diffraction and transmission electron microscopy

Autor: Saghaeian, F., Keckes, J., Woehlert, S., Rosenthal, M., Reisinger, M., Todt, J.
Zdroj: In Thin Solid Films 1 December 2019 691
Databáze: ScienceDirect