Thermal stability of a-C:H:SiOx thin films in hydrogen atmosphere
| Autor: | Grenadyorov, A.S., Solovyev, А.А., Oskomov, K.V., Sypchenko, V.S. |
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| Zdroj: | In Thin Solid Films 30 November 2019 690 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Grenadyorov, A.S., Solovyev, А.А., Oskomov, K.V., Sypchenko, V.S. |
|---|---|
| Zdroj: | In Thin Solid Films 30 November 2019 690 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect