Cross sectional complex structure analysis is a key issue of thin film research: A case study on the preferential orientation crossover in TiN thin films
| Autor: | Barna, P.B., Biro, D., Hasaneen, M.F., Székely, L., Menyhárd, M., Sulyok, A., Horváth, Z.E., Pekker, P., Dódony, I., Radnóczi, G. |
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| Zdroj: | In Thin Solid Films 31 October 2019 688 |
| Databáze: | ScienceDirect |
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