Influence of ion beam parameters onto two-dimensional optical thin film thickness distributions deposited by ion beam sputtering
| Autor: | Sakiew, Wjatscheslaw, Schrameyer, Stefan, Jupé, Marco, Schwerdtner, Philippe, Erhart, Nick, Starke, Kai, Ristau, Detlev |
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| Zdroj: | In Thin Solid Films 31 July 2019 682:109-120 |
| Databáze: | ScienceDirect |
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