Effects of NH3 flow on structural and optical properties of ZnO films grown by atmospheric-pressure chemical vapor deposition
| Autor: | Terasako, Tomoaki, Ogura, Yoshinori, Yagi, Masakazu |
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| Zdroj: | In Thin Solid Films 1 April 2019 675:50-58 |
| Databáze: | ScienceDirect |
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