Thin film deposition method for ZnO nanosheets using low-temperature microwave-excited atmospheric pressure plasma jet
| Autor: | Shahiduzzaman, Md., Yamada, Ryosuke, Chikamatsu, Tatsuki, Ono, Tsunehisa, Tanaka, Yasunori, Uesugi, Yoshihiko, Karakawa, Makoto, Kuwabara, Takayuki, Takahashi, Kohshin, Ishijima, Tatsuo, Taima, Tetsuya |
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| Zdroj: | In Thin Solid Films 31 March 2019 674:58-63 |
| Databáze: | ScienceDirect |
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