Diamond like carbon films with embedded Cu nanoclusters deposited by reactive high power impulse magnetron sputtering: Pulse length effects

Autor: Meškinis, Š., Vasiliauskas, A., Andrulevičius, M., Jurkevičiūtė, A., Peckus, D., Tamulevičius, S.
Zdroj: In Thin Solid Films 1 March 2019 673:1-6
Databáze: ScienceDirect