Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup
| Autor: | Gablech, Imrich, Svatoš, Vojtěch, Caha, Ondřej, Dubroka, Adam, Pekárek, Jan, Klempa, Jaroslav, Neužil, Pavel, Schneider, Michael, Šikola, Tomáš |
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| Zdroj: | In Thin Solid Films 31 January 2019 670:105-112 |
| Databáze: | ScienceDirect |
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