Deposition of microcrystalline diamond films in H2 microwave plasma with graphite powder as hydrocarbon precursor

Autor: Yao, Kaili, Dai, Bing, Yang, Lei, Shu, Guoyang, Zhao, Jiwen, Liu, Kang, Cao, Wenxin, Ralchenko, Victor, Han, Jiecai, Zhu, Jiaqi
Zdroj: In Thin Solid Films 1 January 2019 669:103-107
Databáze: ScienceDirect
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