Halide vapor phase epitaxy of Si doped β-Ga2O3 and its electrical properties
| Autor: | Goto, Ken, Konishi, Keita, Murakami, Hisashi, Kumagai, Yoshinao, Monemar, Bo, Higashiwaki, Masataka, Kuramata, Akito, Yamakoshi, Shigenobu |
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| Zdroj: | In Thin Solid Films 30 November 2018 666:182-184 |
| Databáze: | ScienceDirect |
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