Low pressure chemical vapour deposition of BN: Relationship between gas phase chemistry and coating microstructure
| Autor: | Carminati, P., Buffeteau, T., Daugey, N., Chollon, G., Rebillat, F., Jacques, S. |
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| Zdroj: | In Thin Solid Films 31 October 2018 664:106-114 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect