Impact of a SiGe interfacial layer on the growth of a SiC layer on Si with voids at the interface
| Autor: | Juluri, Raghavendra Rao, Gaiduk, Peter, Hansen, John Lundsgaard, Larsen, Arne Nylandsted, Julsgaard, Brian |
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| Zdroj: | In Thin Solid Films 30 September 2018 662:103-109 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect