Structural and electrical characterisation of high-k ZrO2 thin films deposited by chemical spray pyrolysis method
| Autor: | Oluwabi, Abayomi T., Acik, Ilona Oja, Katerski, Atanas, Mere, Arvo, Krunks, Malle |
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| Zdroj: | In Thin Solid Films 30 September 2018 662:129-136 |
| Databáze: | ScienceDirect |
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