Identification of electrical properties in individual thickness layers in aluminium-doped zinc oxide films sputtered at 100 °C
Autor: | Novák, Petr a, ⁎, Očenášek, Jan a, Kozák, Tomáš b, Savková, Jarmila a |
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Zdroj: | In Thin Solid Films 30 August 2018 660:471-476 |
Databáze: | ScienceDirect |
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