Identification of electrical properties in individual thickness layers in aluminium-doped zinc oxide films sputtered at 100 °C

Autor: Novák, Petr a, ⁎, Očenášek, Jan a, Kozák, Tomáš b, Savková, Jarmila a
Zdroj: In Thin Solid Films 30 August 2018 660:471-476
Databáze: ScienceDirect