Ga-doped ZnO films magnetron sputtered at ultralow discharge voltages: Significance of controlling defect generation
| Autor: | Chen, Yuyun, Meng, Fanping, Ge, Fangfang, Xu, Genbao, Huang, Feng |
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| Zdroj: | In Thin Solid Films 30 August 2018 660:840-845 |
| Databáze: | ScienceDirect |
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