Impact of sputter deposition parameters on the microstructural and piezoelectric properties of CrxAl1 −xN thin films
| Autor: | Wistrela, E., Schmied, I., Schneider, M., Gillinger, M., Mayrhofer, P.M., Bittner, A., Schmid, U. |
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| Zdroj: | In Thin Solid Films 28 February 2018 648:76-82 |
| Databáze: | ScienceDirect |
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