Structural and optical characterization of carbon nitride layers deposited by plasma assisted chemical vapor deposition at various conditions
| Autor: | Tkacz-Śmiech, Katarzyna, Koper, Katarzyna, Mikuła, Andrzej, Sahraoui, Bouchta, Jaglarz, Janusz |
|---|---|
| Zdroj: | In Thin Solid Films 31 January 2018 646:28-35 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect