Variation of local chemical compositions of (Ti, Al)N films on inner wall of small hole deposited by high-power impulse magnetron sputtering
| Autor: | Komiya, Hidetoshi, Shimizu, Tetsuhide, Teranishi, Yoshikazu, Morikawa, Kazuo, Yang, Ming |
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| Zdroj: | In Thin Solid Films 31 December 2017 644:99-105 |
| Databáze: | ScienceDirect |
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