Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma
| Autor: | Vasyliev, V.V., Kalinichenko, A.I., Reshetnyak, E.N., Taghavi Pourian Azar, G., Ürgen, M., Strel'nitskij, V.E. |
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| Zdroj: | In Thin Solid Films 30 November 2017 642:207-213 |
| Databáze: | ScienceDirect |
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