Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source
| Autor: | Gablech, Imrich, Caha, Ondřej, Svatoš, Vojtěch, Pekárek, Jan, Neužil, Pavel, Šikola, Tomáš |
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| Zdroj: | In Thin Solid Films 30 September 2017 638:57-62 |
| Databáze: | ScienceDirect |
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