Characterization of IrOx sputtering for IrO2 and IrO2/Pt bottom-electrode piezoelectric micro-electro-mechanical systems applications
| Autor: | Potrepka, Daniel M., Rivas, Manuel, Yu, Haibo, Polcawich, Ronald G., Aindow, Mark, Fox, Glen R. |
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| Zdroj: | In Thin Solid Films 30 September 2017 638:127-137 |
| Databáze: | ScienceDirect |
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