Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study
| Autor: | Dervaux, J., Cormier, P.-A., Moskovkin, P., Douheret, O., Konstantinidis, S., Lazzaroni, R., Lucas, S., Snyders, R. |
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| Zdroj: | In Thin Solid Films 31 August 2017 636:644-657 |
| Databáze: | ScienceDirect |
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