Improving the degree of crystallinity of magnetron-sputtered Ta3N5 thin films by augmenting the ion flux onto the substrate
| Autor: | Rudolph, M., Demeter, A., Foy, E., Tiron, V., Sirghi, L., Minea, T., Bouchet-Fabre, B., Hugon, M.-C. |
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| Zdroj: | In Thin Solid Films 31 August 2017 636:48-53 |
| Databáze: | ScienceDirect |
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