Method for Al thin film surface nanostructuring using Al imprinting and anodic oxidation: Application to a high capacitance density metal-insulator-metal capacitor
| Autor: | Hourdakis, Emmanouel, Nassiopoulou, Androula G. |
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| Zdroj: | In Thin Solid Films 1 January 2017 621:36-41 |
| Databáze: | ScienceDirect |
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