Pressure dependence of (Ti, Al)N film growth on inner walls of small holes in high-power impulse magnetron sputtering
| Autor: | Shimizu, Tetsuhide, Komiya, Hidetoshi, Teranishi, Yoshikazu, Morikawa, Kazuo, Nagasaka, Hiroshi, Yang, Ming |
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| Zdroj: | In Thin Solid Films 28 February 2017 624:189-196 |
| Databáze: | ScienceDirect |
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