The influence of amorphous TaNx under-layer on the crystal growth of over-deposited Ta film
| Autor: | Wang, Wei-Lin, Chen, Wei-Chun, Peng, Kuo-Tzu, Kuo, Hsien-Chang, Yeh, Ming-Hsin, Chien, Hung-Ju, Ying, Tzung-Hua |
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| Zdroj: | In Thin Solid Films 31 March 2016 603:34-38 |
| Databáze: | ScienceDirect |
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