Properties of silicon nitride thin overlays deposited on optical fibers — Effect of fiber suspension in radio frequency plasma-enhanced chemical vapor deposition reactor
Autor: | Śmietana, M., Dominik, M., Myśliwiec, M., Kwietniewski, N., Mikulic, P., Witkowski, B.S., Bock, W.J. |
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Zdroj: | In Thin Solid Films 31 March 2016 603:8-13 |
Databáze: | ScienceDirect |
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