Properties of silicon nitride thin overlays deposited on optical fibers — Effect of fiber suspension in radio frequency plasma-enhanced chemical vapor deposition reactor

Autor: Śmietana, M., Dominik, M., Myśliwiec, M., Kwietniewski, N., Mikulic, P., Witkowski, B.S., Bock, W.J.
Zdroj: In Thin Solid Films 31 March 2016 603:8-13
Databáze: ScienceDirect