Industrialization of Hot Wire Chemical Vapor Deposition for thin film applications
| Autor: | Schropp, R.E.I. |
|---|---|
| Zdroj: | In Thin Solid Films 30 November 2015 595 Part B:272-283 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Schropp, R.E.I. |
|---|---|
| Zdroj: | In Thin Solid Films 30 November 2015 595 Part B:272-283 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect