Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
| Autor: | Nepal, Neeraj, Anderson, Virginia R., Hite, Jennifer K., Eddy, Charles R., Jr. |
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| Zdroj: | In Thin Solid Films 31 August 2015 589:47-51 |
| Databáze: | ScienceDirect |
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