Microstructure of ZnO thin films deposited by high power impulse magnetron sputtering
| Autor: | Reed, A.N., Shamberger, P.J., Hu, J.J., Muratore, C., Bultman, J.E., Voevodin, A.A. |
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| Zdroj: | In Thin Solid Films 31 March 2015 579:30-37 |
| Databáze: | ScienceDirect |
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