Chemical mechanical polishing of transparent conductive layers using spherical cationic polymer microbeads
| Autor: | Nagaoka, Shoji, Ryu, Naoya, Yamanouchi, Akio, Shirosaki, Tomohiro, Horikawa, Maki, Sakurai, Hideo, Takafuji, Makoto, Ihara, Hirotaka |
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| Zdroj: | In Thin Solid Films 2 February 2015 576:31-37 |
| Databáze: | ScienceDirect |
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