Strategy for silicon based hot-wire chemical vapor deposition without wire silicide formation
| Autor: | Laukart, Artur, Harig, Tino, Höfer, Markus, Schäfer, Lothar |
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| Zdroj: | In Thin Solid Films 30 January 2015 575:38-41 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect